- |
This device can attenuate the charge potential on wafers etc. placed under general atmosphere to 1/10 of the original value in less than 1 second. |
- |
A stable static elimination effect can be obtained regardless of flowing condition of gases. As the gas in the space irradiated by the light will be extensively ionized, the static elimination performance will not be affected even by uneven air flows in the vicinity of the target object to be freed from static. |
- |
No daily maintenance work is required. Only requirement is that the soft X-ray tube must be replaced after its service life (an average of 8000h) has expired. |
- |
The residual potential of the object of static elimination can be reduced to 0V on account of even distribution of positive and negative ions and electrons. |
- |
Because the light directly ionizes gas molecules, static elimination is enabled even within inert gases such as N2 or Ar if under the atmospheric pressure. |
- |
Ionization using the light irradiation method generates no dust at all, and hardly any electromagnetic noise. |
- |
High energy light quickly ionizes even oxygen molecules in the air. Therefore, hardly any ozone is generated. |
- |
The system consists of only two units: a soft X-ray tube head and the power unit. This means that the system can be installed easily on any manufacturing or conveyor systems. |